SETO 1.60 Ifoto Yamafoto SHMC

1) Ipfunyika ni iki?

Ipitingi ya spin nuburyo bukoreshwa mukubika firime imwe yoroheje kuri substrate.Mubisanzwe umubare muto wibikoresho byo gutwikirwa ushyirwa hagati ya substrate, ikaba izunguruka kumuvuduko muke cyangwa ntizunguruka na gato.Substrate noneho izunguruka ku muvuduko ugera ku 10,000 rpm kugirango ikwirakwize ibikoresho byo gutwikisha imbaraga za centrifugal.Imashini ikoreshwa mu kuzunguruka yitwa spin coater, cyangwa kuzunguruka gusa.
Kuzunguruka birakomeza mugihe amazi azunguruka kumpande ya substrate, kugeza ubunini bwifuzwa bwa firime bugerweho.Gukoresha ibishishwa mubisanzwe birahindagurika, kandi icyarimwe bigahinduka.Umuvuduko mwinshi wo kuzenguruka, filimi yoroheje.Umubyimba wa firime uterwa kandi nubukonje hamwe nubushakashatsi bwibisubizo, hamwe na solve.Isesengura ry'ubupayiniya bw'isesengura rya spin ryakozwe na Emslie n'abandi, kandi ryongerewe n'abanditsi benshi bakurikiranye (barimo Wilson n'abandi., [4] bize ubushakashatsi ku kigero cyo gukwirakwira mu kuzunguruka; na Danglad-Flores n'abandi., [5] wasanze ibisobanuro kuri bose kugirango ahanure ubunini bwa firime yabitswe).
Ipitingi ya spin ikoreshwa cyane muri microfabrica yububiko bwa oxyde ikora kumirahuri cyangwa substrate imwe ya kristu ikoresheje sol-gel preursors, aho ishobora gukoreshwa mugukora firime imwe yoroheje ifite ubugari bwa nanoscale. [6]Ikoreshwa cyane muri Photolithography, kugirango ubike ibice bya fotoreziste hafi ya micrometre 1.Ubusanzwe Photoresist azunguruka kuri 20 kugeza 80 kuri revolisiyo kumasegonda 30 kugeza 60.Irakoreshwa kandi cyane muguhimba planar Photonic structure ikozwe muri polymers.
Inyungu imwe yo kuzunguruka firime yoroheje nuburinganire bwa firime.Bitewe no kuringaniza, ubunini ntibutandukanye kurenza 1%.Nyamara, kuzenguruka kuzunguruka ya firime nini ya polymers hamwe nabafotora barashobora kuvamo amasaro manini ugereranije afite planarisation ifite imipaka igaragara.